The SuperSTEM has a spherical aberration corrector integrated into its column, which nulls all axial aberrations up to fifth order. As a result, an angstrom-scale probe with 0.1 nA of current enables imaging with angstrom-level (0.1 nm) resolution. The electron optics can be quickly changed to produce a 2-3 angstrom probe with 1 nA or more of current for analytical purposes (electron energy loss spectroscopy). The cold field emission gun and an efficiently coupled spectrometer make this instrument optimized for high spatial resolution electron energy loss spectroscopy (EELS).

Techniques: EELS, atomic-resolution imaging (HAADF)